UC2 Capacitive Pressure Sensor Measuring principle

The Ceracore UC2 capacitive pressure sensor is Al2O3 (99.9 %), a highly resistant ceramic material for many aggressive gases and liquids. Cylindrical ceramic components (diaphragm, meter body) are bonded to form a high- strength, hermetically sealed pressure sensor element. With absolute pressure sensors, the vacuum of 3.0 x 10-6 mbar created in the production process between the diaphragm and the meter body remains permanently. This permits pressure measurements related to the vacuum. With gauge pressure sensors, the back of the diaphragm is vented, i.e. this sensor measures the gauge pressure relative to the atmospheric pressure. Electrically, the sensor element represents a plate capacitor whose capacitance change is the dimension for the pressure change. The capacitive measuring process satisfies the highest requirements concerning resolution and reproducibility. Together with the hysteresis-free behavior of the material Al2O3 , it is the basis for the excellent specifications of the sensor. In addition, the Ceracore UC2 capacitive pressure transducer is a dry measuring cell, i.e. there is no separating diaphragm or filling fluid which could influence the measurement. A further advantage of the capacitive ceramic sensor is its high overload resistance. After removal of the overload, it returns to the initial position without any damage or hysteresis.